Ultra-Flat Vacuum Chucks & Stepper Chucks

Ultra-Flat Ceramic Vacuum Chucks & Steppers



Solutions Developed Specifically for Wafer Handling
As a leader in technical ceramics for wafer processing equipment, CoorsTek understands advanced semiconductor manufacturing and constantly develops new materials, designs, and processes to optimize yields and extend product life.

Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications. We offer:
  • Ultra-flat capabilities
  • Mirror polish
  • Exceptionally lightweight
  • High stiffness
  • Low thermal expansion
  • Large size capability – 300 mm and beyond
  • Extreme wear resistance
High-Purity Materials Expertise
From powder production and basic forming to precision finishing and measurement, CoorsTek produces high-quality, top-performance components. You'll find our materials:
  • Reduce the effect of particulate contamination
  • Offer ultra-clean purity
  • Minimize wafer contact
  • Resist corrosion in aggressive chemical cleaning
Typical applications include:
  • Lithography
  • Inspection
  • Wafer cleaning
  • Non-vacuum process chambers

Ceramic Vacuum Chucks Brochure


CoorsTek provides critical components for Flat Panel Display (FPD) manufacturing from a range of specialized high-purity technical ceramics. Our experts help you choose the best design and material for optimal performance and component life.
PDF Document – 209 KB – download now arrows


Recommended Materials



PlasmaPure-UC Ultra-High-Purity Alumina
Our latest extremly-high-purity material developed specifically for semiconductor chamber-critical components ensures extreme durablility with minimal contamination. PDF Document – 498 KB – download now arrows



PureSiC® Ultra-High-Purity CVD Silicon Carbide
99.9995% pure, this material lives up to its name. High-purity, full-density PureSiC CVD silicon carbide meets the tough demands of silicon wafer processing.. PDF Document – 219 KB – download now arrows



StatSafe™ Electrostatic Discharge Safe Materials
Protect sensitive microelectronic components from Electrostatic Discharge (ESD) with CoorsTek StatSafe™ ESD-Safe Ceramics. To help prevent the accumulation of static electricity, these static-dissipative materials are ideal for use in semiconductor and electronic industries. PDF Document – 229 KB – download now arrows