Ultra-Flat Vacuum Chucks & Stepper Chucks

Ultra-Flat Ceramic Vacuum Chucks & Steppers



Solutions Developed Specifically for Wafer Handling
As a leader in technical ceramics for wafer processing equipment, CoorsTek understands advanced semiconductor manufacturing and constantly develops new materials, designs, and processes to optimize yields and extend product life.

Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications. We offer:
  • Ultra-flat capabilities
  • Mirror polish
  • Exceptionally lightweight
  • High stiffness
  • Low thermal expansion
  • Large size capability – 300 mm and beyond
  • Extreme wear resistance
High-Purity Materials Expertise
From powder production and basic forming to precision finishing and measurement, CoorsTek produces high-quality, top-performance components. You'll find our materials:
  • Reduce the effect of particulate contamination
  • Offer ultra-clean purity
  • Minimize wafer contact
  • Resist corrosion in aggressive chemical cleaning
Typical applications include:
  • Lithography
  • Inspection
  • Wafer cleaning
  • Non-vacuum process chambers

CoorsTek Ceramic Vacuum Chucks

Ceramic Vacuum Chucks Brochure


CoorsTek provides critical components for Flat Panel Display (FPD) manufacturing from a range of specialized high-purity technical ceramics. Our experts help you choose the best design and material for optimal performance and component life.
PDF Document – 209 KB – download now arrows


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