Semiconductor Thermal Mechanical Wear Resistant Fluid Handling Electronic Ceramic Vacuum Wafer Chucks

Advanced Ceramic Vacuum Wafer Chucks

Solutions Developed Specifically for Wafer Handling
As a leader in technical ceramics for wafer processing equipment, CoorsTek understands advanced semiconductor manufacturing and constantly develops new materials, designs, and processes to optimize yields and extend product life.

Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications.

We offer:
  • Ultra-flat capabilities
  • Mirror polish
  • Exceptionally lightweight
  • High stiffness
  • Low thermal expansion
  • Large size capability – 300 mm and beyond
  • Extreme wear resistance
High-Purity Materials Expertise
From powder production and basic forming to precision finishing and measurement, CoorsTek produces high-quality, top-performance components.

You’ll find our materials:
  • Reduce the effect of particulate contamination
  • Offer ultra-clean purity
  • Minimize wafer contact
  • Resist corrosion in aggressive chemical cleaning
Typical applications include:
  • Lithography
  • Inspection
  • Wafer cleaning
  • Non-vacuum process chambers
Typical Materials:
Contact Information:
North America Vacuum Chuck Customer Service
+1.865.425.8234 Tel

Europe Vacuum Chuck Customer Service
+49.831.5758.200 Tel

Asia Vacuum Chuck Customer Service
+82.2.538.9030 Tel


Ceramic Vacuum Chuck Literature:
Advanced Ceramic Vacuum Chucks
PDF Document (252 K)

Related Links:
Semiconductor Ceramics

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