Diffusion & LPCVD Processing
Batch Diffusion & LPCVD Components
Traditional diffusion, LPCVD (Low Pressure Chemical Vapor Deposition), and other batch semiconductor applications require the thermal and purity properties of advanced ceramics.
Engineered Ceramics Components
CoorsTek provides engineered ceramics components specifically designed for batch diffusion and LPCVD requirements including:
Recommended Diffusion & LPCVD Materials
Baffles & Holders
Ceramic baffles provide more complete mixing of reactant gases in process tubes and chambers, improving uniformity and device yields.
Injectors
Ceramic injectors are designed to improve process uniformity around the perimeter of process chambers by delivering a controlled velocity and amount of gas. Advanced ceramics combine high-temperature stability and corrosion resistance for long-term performance and durability in injector applications.
Liners & Process Tubes
Process tubes are used in the reaction zones of semiconductor furnaces - requiring high purity and thermal stability. Some processing equipment uses liners within the process tubes. Smaller, traditional process tubes typically use quartz. Larger, higher performance tubes frequently use high-performance silicon carbide (SiC) with superior strength, rigidity, and durability.
Paddles
Cantilever paddles are used to position semiconductor wafer "boats" or carriers within process tubes, furnace reactors, and other thermal systems. Ceramic cantilever paddles insert and withdraw wafer carriers in process tubes with support only at one end. Longer paddles support higher wafer throughput in larger reactor, using ceramics such as silicon carbide (SiC) to provide the combination of high temperature strength, rigidity, and cleanliness required.
Wafer BOATS & Pedestals
CoorsTek provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. Advanced ceramics deliver excellent thermal resistance and plasma durability while mitigating particles and contaminants. Semiconductor-grade silicon carbide (SiC) also provides high-temperature strength for high-capacity wafer carriers.
Contact & Additional Information
Looking for information about batch diffusion or LPCVD processing project needs, or want to discuss?
Request Download:
Cleaning & Surface Preparation Manual for Silicon Carbide Semiconductor Components
You'll learn more about cleaning with...
- Sequential steps & flow charts
- Methods for initial clean, surface prep & maintenance
- Details for different processes including oxidation and LPCVD nitride, poly, and TEOS
- Ready-to-Install components
