Carbon Susceptors for Epitaxial Growth Processing

Silicon carbide susceptor for epitaxial growth processing.

Wafer carriers used in epitaxial growth processing must endure high temperatures and harsh chemical cleaning. CoorsTek Clear Carbon™ susceptors are engineered specifically for these demanding epitaxy equipment applications. Their high-purity silicon carbide (SiC) coated graphite construction provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance. Fine SiC crystal coating provides a clean, smooth surface, critical for handling since pristine wafers contact the susceptor at many points across their entire area.

  • High purity SiC coated graphite
  • Superior heat resistance & thermal uniformity
  • Fine SiC crystal coated for a smooth surface
  • High durability against chemical cleaning