Ion Implant

Ceramic Components for Ion Implant Equipment

From precision air bearing components and beams to ultra-flat vacuum chucks and thermally stable pins, screws, and frames, advanced ceramic components are engineered for the demanding requirements and delicate nature of ion implant processes. CoorsTek provides advanced, RF-transparent ceramic components for high-performance ion implant equipment including:

Air Bearing components

Air bearings deliver the precision, cleanliness, and speed needed for semiconductor ion implantation. Ceramic air bearing components and guideways provide ultra-precise, rigid, non-contact handling and frictionless motion while ensuring clean, stable, and contaminant-free performance. Learn More

INTERFEROMETER REFERENCE MIRRORS

CoorsTek ceramic interferometer reference mirrors incorporate low expansion engineered ceramics from the most precise geometries, surface characteristics, and dimensional stability available.

SCALE MOUNTS

CoorsTek provides precision measurement components for clean, stable, and contaminant-free performance across temperature and application environments. 

Recommended Materials for Ion Implant Processing

• PlasmaPure™ UC Ultra-Pure Alumina
• PureSiC® Ultra-Pure CVD Silicon Carbide
• StatSafe™ ESD-Safe Ceramics