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Semiconductor Fabrication (front end)

Clean, Durable Ceramic Components for OEM Semiconductor Processing Equipment

CoorsTek engineers semiconductor-grade ceramics for your OEM semi fabrication tools and wafer handling components. Work with our experts to develop semiconductor processing components that last longer, reduce cycle times, and improve yields.

Related Links

Presentation:
Ceramic Solutions Enabling the Evolution of Semiconductor Processing, Ceramics Expo 2018

Article:
Ceramic Industry: Semiconductor-Grade Ceramics Enable Future Electronics, June 2017


Deposition

Deposition

  • CVD, PVD & ALD
  • ECP/ECD
Etch

Etch

  • Plasma etch (dry etch)
  • High voltage RF
High Temp Processing

High Temp Processing

  • Rapid thermal process
  • Anneal, oxidation, epi
Ion Implant

Ion Implant

  • Air bearing guides
  • Scale mounts
Lithography & Wafer Inspection

Lithography & Wafer Inspection

  • Photomask substrates
  • Wafer chucks & tables
Diffusion & LPCVD Processing

Diffusion & LPCVD Processing

  • Batch diffusion
  • LPCVD
Wafer Planarization (CMP)

Wafer Planarization (CMP)

  • CMP polishing tables
  • Direct sintered SiC
General Applications & Wafer Handling

General Applications & Wafer Handling

  • End effectors
  • Heaters

CONNECT WITH COORSTEK

Regional

  • Contact Corporate Headquarters
  • Contact CoorsTek Asia
  • Contact CoorsTek Europe
  • Facility Locations