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Quartz

Family Overview

Synthetic quartz or fused silica (silicon oxide, SiO2) ceramics exhibit excellent thermal shock resistance due to extremely low thermal expansion and extreme purity. These unique properties and thermal stability allow CoorsTek quartz to be used in rapid thermal processing, optics, and critical semiconductor fabrication steps, like single crystal silicon pulling.

  • Thermal Shock Resistance
  • Transparent
  • High Purity
  • Corrosion Resistance

 

Ceramic Expertise

Contact a CoorsTek expert to discuss a custom manufactured Quartz solution for your application.

Properties Units Value
Flexural Strength, MOR (20 °C) MPa 105
Fracture Toughness, KIc MPa m1/2 1.0

Thermal Conductivity (20 °C)

W/m K 1.4 - 1.5
Coefficient of Thermal Expansion 1x10-6/°C 0.5 - 0.65
Maximum Use Temperature °C 1000 - 1200
Dielectric Strength (6.35mm) ac-kV/mm
Dielectric Loss (tan δ) 1MHz, 25 °C

10-4

Volume Resistivity (25°C) Ω-cm

1013

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