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Sintered Silicon Nitride

Composition

Si3N4

sintered silicon nitride overview

Sintered silicon nitride's unique grain structure provides excellent mechanical properties for durability in mechanically rigorous environments.

Example Applications

  • Focus rings
  • Seal components

 

CoorsTek Formulations

Contact a CoorsTek expert to discuss a custom manufactured Sintered Silicon Nitride solution for your application.

Property Units Value

Flexural Strength, MOR (20 °C)

MPa

600 - 1000

Fracture Toughness, KIc

MPa m1/2

6.5 - 7.5

Thermal Conductivity (20 °C)

W/m K

19 - 80

Coefficient of Thermal Expansion

1 x 10-6/°C

3.0 - 3.7

Maximum Use Temperature

°C

1150 - 1400

Dielectric Strength (6.35mm)

ac-kV/mm

15

Dielectric Loss (tan δ)

1MHz, 25 °C

0.012

Volume Resistivity (25°C)

Ω-cm

1010 to 1012

The information provided on this chart is for general material property reference only.  The customer should recognize that exact properties of materials may vary according to product configuration but close control of values of most properties can be maintained, if specified. Nothing herein is provided, or is to be construed, as absolute engineering data or constituting a warranty or representation. Contact CoorsTek for cost-effective design, development and manufacturing assistance. CoorsTek has 300+ variations including various forming and firing processes, not all variants are represented in the present website.

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