ESD Safe Materials
Composition
Various Materials
ESD Safe Ceramics overview
CoorsTek has developed electrostatic discharge-safe (ESD-safe) ceramics to protect sensitive microelectronic components from static electricity buildup. StatSafe™ materials and ArcResist™ coatings have electrical resistivities engineered to slowly dissipate accumulated electrostatic and secondary electron charges — preventing rapid discharge or arcing.
Example Applications
- End effectors
- Chuck components
CoorsTek Formulations
Contact a CoorsTek expert to discuss a custom manufactured ESD Safe ceramic solution for your application.
| Property | Units | Value |
|---|---|---|
Flexural Strength, MOR (20 °C) |
MPa |
230 - 1000 |
Fracture Toughness, KIc |
MPa m1/2 |
3.0 - 4.0 |
Thermal Conductivity (20 °C) |
W/m K |
5 - 25 |
Coefficient of Thermal Expansion |
1 x 10-6/°C |
8.3 - 9.5 |
Maximum Use Temperature |
°C |
1000 |
Dielectric Strength (6.35mm) |
ac-kV/mm |
- |
Dielectric Loss (tan δ) |
1MHz, 25 °C |
- |
Volume Resistivity (25°C) |
Ω-cm |
104 to 1010 |
The information provided on this chart is for general material property reference only. The customer should recognize that exact properties of materials may vary according to product configuration but close control of values of most properties can be maintained, if specified. Nothing herein is provided, or is to be construed, as absolute engineering data or constituting a warranty or representation. Contact CoorsTek for cost-effective design, development and manufacturing assistance. CoorsTek has 300+ variations including various forming and firing processes, not all variants are represented in the present website.
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