General Applications & Wafer Handling
General Semiconductor Applications & Wafer Handling
Semiconductor Processing Components
CoorsTek is your partner for custom advanced ceramic components and assemblies to support higher throughput and better yields in your semiconductor processing equipment,
Our materials experts are ready to work with you to develop the optimal right solution for your wafer handling, heating, and processing requirements.
Made from Quality Engineered Ceramics
Engineered ceramics make semiconductor components cleaner, more durable, more effective. Let us help you choose the best semiconductor-grade material for your application:
End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle wafers without producing particulate contamination. In some cases, ESD-safe ceramics are used to prevent static buildup on the wafer surface.
Heaters & Heating Components
CoorsTek assembles a variety of semiconductor-grade, ceramic heaters and components including:
- Tecorundum SiC components
- Aluminum nitride (AlN) heaters
- Quartz & Quartz-carbon heaters
- Silicon nitride (Si3N4) heaters
Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability and corrosion resistance.
Vacuum break filters are used in vacuum process equipment to speed the venting of vacuum chambers and reduce particle adders on wafers — resulting in higher yields and throughput. CoorsTek vacuum break filters use porous ceramics specifically engineered for various types and sizes of vacuum chambers.
Custom Components & Assemblies
From advanced technical ceramic materials to precision assembly and cleanroom packaging, CoorsTek has the capabilities for your next project. We collaborate with you to engineer specialized components, assemblies, and semiconductor quality processes. Contact CoorsTek to discuss your application.
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