Carbon Susceptors for Epitaxial Growth Processing
Wafer carriers used in epitaxial growth processing must endure high temperatures and harsh chemical cleaning. CoorsTek Clear Carbon™ susceptors are engineered specifically for these demanding epitaxy equipment applications. Their high-purity silicon carbide (SiC) coated graphite construction provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance. Fine SiC crystal coating provides a clean, smooth surface, critical for handling since pristine wafers contact the susceptor at many points across their entire area.
- High purity SiC coated graphite
- Superior heat resistance & thermal uniformity
- Fine SiC crystal coated for a smooth surface
- High durability against chemical cleaning