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Epitaxy

Carbon Susceptors for Epitaxial Growth Processing

Wafer carriers used in epitaxial growth processing must endure high temperatures and harsh chemical cleaning. CoorsTek Clear Carbon™ susceptors are engineered specifically for these demanding epitaxy equipment applications. Their high-purity silicon carbide (SiC) coated graphite construction provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance. Fine SiC crystal coating provides a clean, smooth surface, critical for handling since pristine wafers contact the susceptor at many points across their entire area.

  • High purity SiC coated graphite
  • Superior heat resistance & thermal uniformity
  • Fine SiC crystal coated for a smooth surface
  • High durability against chemical cleaning

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