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yttria overview

Yttria (yttrium oxide, Y2O3) is a rare-earth ceramic which exhibits both exceptional plasma resistance and an aptitude for high-temperature applications. Yttria is often used to stabilize other ceramic compositions like zirconia.

CoorsTek Exyria™ yttria can be formed into both solid parts and coatings for parts requiring exceptional corrosion resistance. Applying a PlasmaResist™ coating to compatible ceramic and metal components creates a corrosively inert barrier of pure yttria.

  • Plasma resistance
  • High stability
  • Heat resistance
  • Various application methods

Example Applications

  • Etch chamber components


CoorsTek Formulations

Contact a CoorsTek expert to discuss a custom manufactured Yttria solution for your application.

Property Units Value

Flexural Strength, MOR (20 °C)


100 - 430

Fracture Toughness, KIc

MPa m1/2

1.0 - 4.0

Thermal Conductivity (20 °C)

W/m K

10 - 14 

Coefficient of Thermal Expansion

1 x 10-6/°C

7.9 - 8.2

Maximum Use Temperature



Dielectric Strength (6.35mm)



Dielectric Loss (tan δ)

1MHz, 25 °C

4 x 10-4

Volume Resistivity (25°C)


1014 to 1016

The information provided on this chart is for general material property reference only.  The customer should recognize that exact properties of materials may vary according to product configuration but close control of values of most properties can be maintained, if specified. Nothing herein is provided, or is to be construed, as absolute engineering data or constituting a warranty or representation. Contact CoorsTek for cost-effective design, development and manufacturing assistance. CoorsTek has 300+ variations including various forming and firing processes, not all variants are represented in the present website.

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