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ESD Safe Materials

Composition

Various Materials

ESD Safe Ceramics overview

CoorsTek has developed electrostatic discharge-safe (ESD-safe) ceramics to protect sensitive microelectronic components from static electricity buildup. StatSafe™ materials and ArcResist™ coatings have electrical resistivities engineered to slowly dissipate accumulated electrostatic and secondary electron charges — preventing rapid discharge or arcing.

Example Applications

  • End effectors
  • Chuck components

 

CoorsTek Formulations

Contact a CoorsTek expert to choose an ESD Safe solution for your application.

Property Units Value

Flexural Strength, MOR (20 °C)

MPa

230 - 1000

Fracture Toughness, KIc

MPa m1/2

3.0 - 4.0

Thermal Conductivity (20 °C)

W/m K

5 - 25

Coefficient of Thermal Expansion

1 x 10-6/°C

8.3 - 9.5

Maximum Use Temperature

°C

1000

Dielectric Strength (6.35mm)

ac-kV/mm

-

Dielectric Loss (tan δ)

1MHz, 25 °C

-

Volume Resistivity (25°C)

Ω-cm

104 to 1010

The information provided on this chart is for general material property reference only.  The customer should recognize that exact properties of materials may vary according to product configuration but close control of values of most properties can be maintained, if specified. Nothing herein is provided, or is to be construed, as absolute engineering data or constituting a warranty or representation. Contact CoorsTek for cost-effective design, development and manufacturing assistance. CoorsTek has 300+ variations including various forming and firing processes, not all variants are represented in the present website.

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